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Wafer Breakage / Wafer Scratches / Equipment Setup / Level Verification / Predictive Corrective Maintenance
Process equipment scratches the back side of the wafers. Vast engineering efforts were made without finding the root cause.
Using SmartWafer the customer found that the equipment robot arm touches the wafer every time it goes in. The lower chart shows a peak each time that the arm touches the wafer. The upper chart shows normal behaviour of a robot arm.
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