Wafer Scratches
Problem description:

Process equipment scratches the back side of the wafers.  Vast engineering efforts were made without finding the root cause.

InnerSense Solution:
Using SmartWafer  the customer found that the equipment robot arm touches the wafer every time it goes in. The lower chart shows a peak each time that the arm touches the wafer. The upper chart shows normal behaviour of a robot arm.    

wafer handling diagnostic

wafer scratches