• HOME

  • SOLUTIONS

    • Wafer Breakage
    • Wafer Scratches
    • Equipment Setup
    • Level Verification
    • Predictive Corrective Maintenance
    • Defects reduction
    • Tools Run Rate matching
    • PM Recovery

  • PRODUCTS

    • Wafer handling monitor
    • Real Time SmartWafer
    • RH (Relative Humidity) wafer/reticle gau
    • EWG (Eccentricity & Wobble Gauge)
    • SMR (Smart Reticle)
    • On-Line Equipment Monitoring
    • Stand alone vibration sensor
    • Process Tool Integration
    • FPD Glass Handling Analyser
    • PV Wafer Handling Analyzer

  • DOWNLOADS

  • ABOUT US

    • Our Mission
    • Quality & Environmental Contro
    • Company Profile
    • Management
    • Career Opportunities

  • CONTACT US

  • More

    Use tab to navigate through the menu items.
    Innersense_KLA_logo-1Color_White_Clear_72dpi.png

    ​

    Thank you for your interest in our products.

    We'll get back to you shortly.

    ​

    ​

    ​

    © Copyright 2008-2012 Innersense. All rights reserved