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Wafer Handling Monitor / Real-Time SmartWafer / RH (Relative Humidity) wafer/reticle gauge / EWG (Eccentricity & Wobble Gauge) / SMR (Smart Reticle)
On line equipment monitoring / Stand alone vibration analysis / Process tool integration / FPD glass handling analyzer / PV wafer handling analyzer
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On-Line Equipment Monitoring
Product description:
A multi-axis accelerometer sensor with signal-processing electronics is mounted inside a ruggedized miniature module. The sensor module is fixed to a process tool and measures the accelerations, vibrations and motions of a critical moving part
(e.g. a robot spindle).
The measurements are sent to a computer for on-line robotic monitoring during production.
Sophisticated s/w is used to quantify and analyze the mechanical behavior of the production tool during each individual time segment. The on-line signal is compared to the historical data, using statistical calculations and SPC rules, and automatically flags abnormal mechanical behaviors.
The system includes a user friendly interface for historical data mining (trends, comparison between runs, tools, etc.)
Multi-channel operation for the simultaneous monitoring of several moving parts (e.g. 4 robots) is optional.
Specifications:
Sensitivity: 3mG
Frequency response: 0Hz - 10KHz
Communication: USB connection
Power: supplied by USB connection
Example:
