Predictive Corrective Maintenance

Problem Description:

Mechanical components like turbo pumps will fail upon reaching the end of life working hours. The current methodology is either "Run to failure" which most probably damage production wafers, or, perform a scheduled preventive maintenance which will increase the tool down time

InnerSense solution (example):

After a turbo pump failure that caused a wafer breakage, the engineer looked at vibration tests made prior to the failure (which he ignored). Signal for the pump degradation is very clear

Note: By using the fully automated system this turbo pump would have been flagged, avoiding damage to production wafers, long tools recovery time and other cost involved