On-line vibration monitoring of glass transfer robots for providing alerts on mechanical failures or deterioration that can lead to production glass damage  The system hardware, s/w and methodology is based on the  InnerSense “Smart Wafer” technology.

Vibration sensor is mounted on the robot arm .During the glass transfer cycle, the sensor records high & low frequency vibration & accelerations. Upon reaching the home position, the sensor (optically) communicates via the “reading & charging unit”, & downloads the recorded data to the PC.   It is also being wirelessly charged at that point. Based on historical data, SPC rules and a few parameters set by the user, the system provides alerts in case of abnormal robot mechanical behavior. The system can be connected to the fab central process control system or send messages to a predefined list of engineers

FPD glass handling analyzer

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