Wafer Breakage / Wafer Scratches / Equipment Setup / Level Verification / Predictive Corrective Maintenance
Meeting the schedule of fab equipment installation and setup is very challenging.
It requires management of many suppliers and fab equipment personnel. SmartWafer users have been able to shorten the setup time.
By collecting a data base of all equipment mechanical behavior as "FingerPrints" our customers can compare the mechanical behavior of the newly installed equipment to their reference and decide if the equipment is properly installed and mechanically adjusted. Time has been saved with shortened marathon runs, better control of supplier source inspection and tool setup. Some of the equipment suppliers contribute to the process by in-house inspection of the equipment according to the end users' "FingerPrints".