Wafer Handling Monitor / Real-Time SmartWafer / RH (Relative Humidity) wafer/reticle gauge / EWG (Eccentricity & Wobble Gauge) / SMR (Smart Reticle)
On line equipment monitoring / Stand alone vibration analysis / Process tool integration / FPD glass handling analyzer / PV wafer handling analyzer
InnerSense is working with several equipment makers to integrate the SmartWafer functionality into their tool set.
This enables instant synchronization with tool log and tool based SPC analysis to quickly identify and locate mechanical abnormalities.
Tool makers can apply their expertise and extensive library of tool data to accurately flag issues, drive a precision maintenance program, and optimize tool cost of ownership.