Tools Run Rate matching

With the SMW2 system, differences in acceleration settings between tools are easily detected, allowing improved control and tool to tool matching. Variations in acceleration settings can lead to decreased run rates and performance differences. The handler setting differences are often invisible to the process, not impacting the inline measurements, however, these handler differences lead to decreased run rates, increased cycle time and increased variability in performance. Further, differences in handler settings tool to tool adds an additional layer of complication when trying to isolate root cause for particle issues and tool performance. The SMW2 system allows for immediate detection of differences in handler acceleration settings and can be used to eliminate this uncontrolled variation.

Solutions

The acceleration signal shows the difference between two tools robot accelerations.

The analysis s/w can measure this difference, decide if this difference is statistically significant, and if needs to be included in the “Tool Comparison” report.

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