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New era in
tool mechanical


InnerSense develops manufactures and markets wafer handling
diagnostic solutions for the semiconductor industry.
​The flagship product SmartWafer ​is used in more than 25 semiconductor
manufacturing fabs worldwide.
Our Mission

InnerSense vision is to provide its customers with the best method for troubleshooting and monitoring wafer handling.


Our Goal

To detect and predict abnormal mechanical behaviors, that may cause:


  • Wafer breakage

  • Wafer scratches

  • Wafer chipping

  • Mechanical particles​

Innersense - Semiconductor tool mechanical monitoring

View technical paper published in Solid State Technology magazine.

InnerSense developed the Docking Station for  an automated FAB , compatible to  full OHV and Host connectivity.

It has been adopted already by some of the largest IC manufacturers to be used as a regular fully automated manufacturing

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