top of page
New era in
semiconductor
tool mechanical
monitoring
InnerSense develops manufactures and markets wafer handling
diagnostic solutions for the semiconductor industry.
The flagship product SmartWafer is used in more than 25 semiconductor
manufacturing fabs worldwide.
Our Mission
InnerSense vision is to provide its customers with the best method for troubleshooting and monitoring wafer handling.
Our Goal
To detect and predict abnormal mechanical behaviors, that may cause:
-
Wafer breakage
-
Wafer scratches
-
Wafer chipping
-
Mechanical particles
Innersense - Semiconductor tool mechanical monitoring
View technical paper published in Solid State Technology magazine.

InnerSense developed the Docking Station for an automated FAB , compatible to full OHV and Host connectivity.
It has been adopted already by some of the largest IC manufacturers to be used as a regular fully automated manufacturing
monitor.
bottom of page