New era in
semiconductor
tool mechanical
monitoring​

 

InnerSense develops manufactures and markets wafer handling
diagnostic solutions for the semiconductor industry.

​The flagship product SmartWafer ​is used in more than 25 semiconductor
manufacturing fabs worldwide.

​Our Goal​

​
To detect and predict abnormal mechanical behaviors, that may cause:

 

• Wafer breakage

• Wafer scratches

• Wafer chipping

• Mechanical particles​

Our Mission

​

InnerSense vision is to provide its customers with the best method for troubleshooting and monitoring wafer handling.

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Innersense - Semiconductor tool mechanical monitoring

View technical paper published in Solid State Technology magazine.