Temperature Measurement Wafer

Like the Wafer Handling Analyzer the temperature wafer is made of 9 or 17 RTD temperature sensors spread on the surface of a wafer which are connected to an electronic circuit (81mm diameter x 3mm thick) ± Temperature range is -20ºc to 150ºc. The wafer is handled throughout the tool as a regular test wafer, and the temperature is measured (on the various hot plates) and logged by the electronic circuit . After completing the test run the wafer is returned to a special reader where the data is downloaded to a PC and displayed for analysis and control.