Wafer Handling Analyzer

• General Description
• SmartWafer Specification
• SmartWafer Reading / Charging Station
• SmartWafer Analysis Software
• SPC - Statistical Process Control

SmartWafer General Description

The InnerSense SmartWafer runs through the equipment and records vibrations and acceleration along its route.
After completing the recording process, the data is downloaded via an external reading station into a PC.
The data is then synchronized with the equipment sequence of events and compared to the historic "good" fingerprint.
Any abnormal signals indicate and pinpoint bad mechanical components or alignments which are causing particles, defects or scratches on the wafer

Standard 300mm and 200mm wafers are available. A common 15 gr electronics package is bonded to the wafers adding 2.5mm to the thickness across an 83mm diameter. Silicon is used to closely match the behavior of a real wafer, so it can run in the same mechanical recipe as a regular wafer in the wafer handling system. The electronic circuit is conformally coated with silicon adhesive. Sensitivity 3mG, Frequency response 10Hz to 10Khz, Operating Temperature 150 c < 2 min, 100 c for 15 min, 80 c with no time limit Operating Pressure. 10-7 - 760T Battery Operation. 3hrs per charge.

SmartWafer Reading/Charging Station
Reading unit. 12.5" by 13" by 1" weight : 8lbs

SmartWafer Analysis Software

Acceleration: Low frequency signals are used to capture and report overall acceleration levels in the X and Y axis. Vibration: The high frequency capability enables the SmartWafer to capture detailed information caused by bearing wear, physical contact like rubbing which may shed particles or any undesirable motion of the wafer or other nearby mechanisms. Vibrations are captured in all axes. Data Analysis: Advanced pattern recognition algorithms are used to analyze traces and allow two plots to be overlaid for comparison and superimposed with time events for easy tracking. Data download: Typically less than 30secs. Software compatibility: Microsoft Windows, 2000, XP and Vista.

InnerSene welcome process equipment manufactures to integrate the software in their equipment.