Wafer Scratches
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Problem description: Process equipment scratches the back side of the wafers. Vast engineering efforts were made without finding the root cause. InnerSense Solution: Using SmartWafer the customer found that the equipment robot arm touches the wafer every time it goes in. The upper chart shows a peak each time that the arm touches the wafer. The lower chart shows normal behaviour of a robot arm. |
| Bad Test results |
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| Good Test results (Finger Print) |
