HPM

High Precision Maintenance (HPM) is the latest methodology for the most effective planning of equipment maintenance. For years equipment users have been struggling with the dilemma of planning maintenance schedules. They started performing P.M. according to the suppliers recommendations. They found that they could save costs by skipping P.Ms in order to increase fab productivity. This led to major manufacturing excursions due to lack of maintenance, causing major Yield losses. By using InnerSense SmartWafer and comparison to the Finger Print, changes and trends can indicate which sub system needs to be included in the next PM This reduces material and labor consumption and increases productivity and line yield.