|
Motivation
How doe's it work?
Facts
A case study
|
|
| |
Motivation
The development of new Flat Panel Display (FPD) generations results in an increase in panel size while the glass thickness is becoming thinner and thinner. Each generation results in more challenges in panel handling. Panels break, get chipped and scratched more frequently. Equipment setup is longer and mechanical adjustment is more difficult. By utilizing the Innersense field-proven technology in IC manufacturing, FPD manufacturers can now:
- Troubleshoot equipment panel handling problems.
- Reduce breakage, chipping and scratches.
- Reduce cost by developing more efficient methodologies of preventive maintenance.
|
|
| |
How does it work?
Miniature vibration sensors in an electronic circuit and a rechargeable battery are attached to a plate with 2 magnets. Two magnetic stainless steel small disks are glued to the test glass, on which the sensor with the magnets is mounted. During the handling of the test glass through the equipment, it records vibrations and accelerations along its route. After completing the recording process, the data is downloaded via an external reading station to a PC. The data is then synchronized with the equipment sequence of events and compared to the historic "good" fingerprint. Any abnormal signals indicate and pinpoint bad mechanical components or alignments which can cause chipping, particles, defects or scratches to the panel.
|
|
| |
 |
|
| |
The plate with the magnets |
|
| |
Facts:
- The system repeatability is better than 0.1%.
- Placing the sensor at any position on the test glass will give the same results.
- Applying force at any position on the test glass will cause vibrations and will be detected.
|
|
| |
A Case Study:
While a test glass was moving on a slide conveyor, a small object (less than 10g) touched the glass. The chart below compares the glass vibrations during a typical movement (blue) and an interrupted movement (pink). There are intense vibrations during the contact event and "after shock" vibrations which continue for two seconds. This type of event may cause the glass to get chipped or scratched.
|
|
| |
 |
|
