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Meeting the schedule of fab equipment installation and set up is very challenging. It requires management of many suppliers and company equipment personnel. SmartWafer users have been able to shorten the setup time. By collecting a data base of all equipment mechanical behavior as "Finger Prints" they are able to compare the mechanical behavior of the newly installed equipment with their reference and to judge if the equipment is properly installed and mechanically adjusted. Time has been saved by shortened marathon runs, better control of supplier source inspection and tool setup. Some of the equipment suppliers contribute to the process by in-house inspection of the equipment according to the end users' "Finger Prints".
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