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InnerSense Ltd. develops and manufactures semiconductors equipment wireless diagnostics systems |
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By using the InnerSense smart temperature measurement wafer, you can gain yield, tool availability and cost of ownership |
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By using the InnerSense vibration and leveling diagnostics on your fab equipment, you can increase productivity by more than 5% |
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U.S. Pat. No. 7,029,930 B2 |